Spectroscopic techniques for semiconductor industry /
Material type:
TextPublication details: Singapore World Scientific Publishing 2023Description: xiv, 310 pages : illustrationsISBN: 9789811257599Subject(s): Spectrum analysis | SemiconductorsDDC classification: 621.361 Summary: "The unique compendium presents special principles and techniques of spectroscopic measurements that are used in semiconductor manufacturing. Since industrial applications of spectroscopy are significantly different from those traditionally used in scientific laboratories, the design concepts and characteristics of industrial spectroscopic devices may vary significantly from conventional systems. These peculiarities are thus succinctly summarized in this volume for a wide audience of students, engineers, and scientific workers. Exceptionally well-illustrated with practical solutions in detail, this useful reference text will open new horizons in new research areas"--
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Stack | Stack | 621.361 PRO/S (Browse shelf (Opens below)) | Available | 59614 |
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| 621.3191 GIR/E Electrical systems design | 621.3192 CHO/N Networks and systems | 621.36 GUP/O Optics | 621.361 PRO/S Spectroscopic techniques for semiconductor industry / | 621.366 LAS Laser spectroscopy and other topics / | 621.366 LAU/L Lasers and non-linear optics | 621.366 SIL/L Laser fundamentals |
"The unique compendium presents special principles and techniques of spectroscopic measurements that are used in semiconductor manufacturing. Since industrial applications of spectroscopy are significantly different from those traditionally used in scientific laboratories, the design concepts and characteristics of industrial spectroscopic devices may vary significantly from conventional systems. These peculiarities are thus succinctly summarized in this volume for a wide audience of students, engineers, and scientific workers. Exceptionally well-illustrated with practical solutions in detail, this useful reference text will open new horizons in new research areas"--
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