Spectroscopic techniques for semiconductor industry / (Record no. 66978)

000 -LEADER
fixed length control field 01157cam a22001818i 4500
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 9789811257599
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.361
Item number PRO/S
100 1# - MAIN ENTRY--AUTHOR NAME
Personal name Protopopov, V. V.
245 10 - TITLE STATEMENT
Title Spectroscopic techniques for semiconductor industry /
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication Singapore
Name of publisher World Scientific Publishing
Year of publication 2023
300 ## - PHYSICAL DESCRIPTION
Number of Pages xiv, 310 pages :
Other physical details illustrations ;
520 ## - SUMMARY, ETC.
Summary, etc "The unique compendium presents special principles and techniques of spectroscopic measurements that are used in semiconductor manufacturing. Since industrial applications of spectroscopy are significantly different from those traditionally used in scientific laboratories, the design concepts and characteristics of industrial spectroscopic devices may vary significantly from conventional systems. These peculiarities are thus succinctly summarized in this volume for a wide audience of students, engineers, and scientific workers. Exceptionally well-illustrated with practical solutions in detail, this useful reference text will open new horizons in new research areas"--
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical Term Spectrum analysis
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical Term Semiconductors
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type BK
001 - CONTROL NUMBER
control field 22685321
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
LC control number 2022021000
952 ## - LOCATION AND ITEM INFORMATION (KOHA)
Withdrawn status
Lost status
Damaged status
Holdings
Collection code Home library Shelving location Date acquired Full call number Accession Number Koha item type
Stack Kannur University Central Library Stack 19/06/2023 621.361 PRO/S 59614 BK

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