Spectroscopic techniques for semiconductor industry / (Record no. 66978)
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000 -LEADER | |
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fixed length control field | 01157cam a22001818i 4500 |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
ISBN | 9789811257599 |
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.361 |
Item number | PRO/S |
100 1# - MAIN ENTRY--AUTHOR NAME | |
Personal name | Protopopov, V. V. |
245 10 - TITLE STATEMENT | |
Title | Spectroscopic techniques for semiconductor industry / |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
Place of publication | Singapore |
Name of publisher | World Scientific Publishing |
Year of publication | 2023 |
300 ## - PHYSICAL DESCRIPTION | |
Number of Pages | xiv, 310 pages : |
Other physical details | illustrations ; |
520 ## - SUMMARY, ETC. | |
Summary, etc | "The unique compendium presents special principles and techniques of spectroscopic measurements that are used in semiconductor manufacturing. Since industrial applications of spectroscopy are significantly different from those traditionally used in scientific laboratories, the design concepts and characteristics of industrial spectroscopic devices may vary significantly from conventional systems. These peculiarities are thus succinctly summarized in this volume for a wide audience of students, engineers, and scientific workers. Exceptionally well-illustrated with practical solutions in detail, this useful reference text will open new horizons in new research areas"-- |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical Term | Spectrum analysis |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical Term | Semiconductors |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | BK |
001 - CONTROL NUMBER | |
control field | 22685321 |
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
LC control number | 2022021000 |
952 ## - LOCATION AND ITEM INFORMATION (KOHA) | |
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Collection code | Home library | Shelving location | Date acquired | Full call number | Accession Number | Koha item type |
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Stack | Kannur University Central Library | Stack | 19/06/2023 | 621.361 PRO/S | 59614 | BK |