Protopopov, V. V.
Spectroscopic techniques for semiconductor industry / - Singapore World Scientific Publishing 2023 - xiv, 310 pages : illustrations ;
"The unique compendium presents special principles and techniques of spectroscopic measurements that are used in semiconductor manufacturing. Since industrial applications of spectroscopy are significantly different from those traditionally used in scientific laboratories, the design concepts and characteristics of industrial spectroscopic devices may vary significantly from conventional systems. These peculiarities are thus succinctly summarized in this volume for a wide audience of students, engineers, and scientific workers. Exceptionally well-illustrated with practical solutions in detail, this useful reference text will open new horizons in new research areas"--
9789811257599
2022021000
Spectrum analysis
Semiconductors
621.361 / PRO/S
Spectroscopic techniques for semiconductor industry / - Singapore World Scientific Publishing 2023 - xiv, 310 pages : illustrations ;
"The unique compendium presents special principles and techniques of spectroscopic measurements that are used in semiconductor manufacturing. Since industrial applications of spectroscopy are significantly different from those traditionally used in scientific laboratories, the design concepts and characteristics of industrial spectroscopic devices may vary significantly from conventional systems. These peculiarities are thus succinctly summarized in this volume for a wide audience of students, engineers, and scientific workers. Exceptionally well-illustrated with practical solutions in detail, this useful reference text will open new horizons in new research areas"--
9789811257599
2022021000
Spectrum analysis
Semiconductors
621.361 / PRO/S