| 000 | 01157cam a22001818i 4500 | ||
|---|---|---|---|
| 001 | 22685321 | ||
| 010 | _a 2022021000 | ||
| 020 | _a9789811257599 | ||
| 082 | 0 | 0 |
_a621.361 _bPRO/S |
| 100 | 1 | _aProtopopov, V. V. | |
| 245 | 1 | 0 | _aSpectroscopic techniques for semiconductor industry / |
| 260 |
_aSingapore _bWorld Scientific Publishing _c2023 |
||
| 300 |
_axiv, 310 pages : _billustrations ; |
||
| 520 | _a"The unique compendium presents special principles and techniques of spectroscopic measurements that are used in semiconductor manufacturing. Since industrial applications of spectroscopy are significantly different from those traditionally used in scientific laboratories, the design concepts and characteristics of industrial spectroscopic devices may vary significantly from conventional systems. These peculiarities are thus succinctly summarized in this volume for a wide audience of students, engineers, and scientific workers. Exceptionally well-illustrated with practical solutions in detail, this useful reference text will open new horizons in new research areas"-- | ||
| 650 | 0 | _aSpectrum analysis | |
| 650 | 0 | _aSemiconductors | |
| 942 | _cBK | ||
| 999 |
_c66978 _d66978 |
||