000			00330nam a22001337a 4500
020			_a9789402420067
082			_a533.5 _bDEL/V
100			_aDelchar, T. A.
245			_aVacuum physics and techniques
260			_aLondon _bChapman & Hall _c1993
300			_a253p.
650			_aVacuum _aVacuum technology _aPhyisics
942			_cBK
999			_c66610 _d66610