000 00564cam a2200229ua 4500
008 130129t2007||||||||||| 00 ||eng c
020 _a978-0-387-29260-1
041 0 _aeng
082 _a621.381 52
_bALF/F
100 _aAlford,, Terry L
245 1 0 _aFundamentals of Nanoscale Film Analysis /
250 _a1
260 _aNew York:
_bSpringer,
_c2007.
300 _a336.
362 1 _a2007.
650 _aPhysics
650 0 _aNano Technology
650 0 _aNano Science
700 _aFeldman,, Leonard C
700 0 2 _aMayer,, James W
942 _cBK
999 _c28244
_d28244