| 000 | 00407cam a2200157ua 4500 | ||
|---|---|---|---|
| 008 | 101030t2009||||||||||| 00 ||||| c | ||
| 082 |
_a621.381 52 _bMEM |
||
| 245 | 0 | 0 | _aMems and moems technology and applications / |
| 260 |
_aNew Delhi: _bPHI Learning, _c2009. |
||
| 300 | _a520p.. | ||
| 362 | 1 | _a2009. | |
| 650 | _aMems technology | ||
| 650 | 0 | _aMoems technology | |
| 650 | 0 | _aEngineering | |
| 942 | _cBK | ||
| 999 |
_c23774 _d23774 |
||