| 000 | 00412cam a2200157ua 4500 | ||
|---|---|---|---|
| 020 | _a1-58488-306-5 | ||
| 082 |
_a621.3 _bPEL/M |
||
| 100 | _aPelesko,John A. | ||
| 245 | 1 | 0 | _aModeling MEMS and NEMS / |
| 260 |
_aBoca Raton _bChapman&Hall _c2003 |
||
| 300 | _a357p. | ||
| 500 | _aIncludes index. | ||
| 650 | 0 | _aMicroelectromechanical systems- Mathematical models | |
| 700 | 0 | 2 | _aBernstein, David H. |
| 942 | _cBK | ||
| 999 |
_c17650 _d17650 |
||