000 00431cam a2200157ua 4500
020 _a81-242-0508-6
082 _a621.381 52
_bHAN
245 0 0 _aHandbook of semiconductor silicon technology
260 _aNew Delhi
_bCrest
_c2005
300 _a795p.
500 _aIncludes index.
650 _aEngineering- Silicon technology
650 0 _aApplied physics- Silicon technology
700 _aO'Mara William C et al.
942 _cBK
999 _c17645
_d17645