000 00444cam a2200181ua 4500
020 _a1-86094-493-0
020 _a978186094932
082 _a621.381 52
_bGAU/S
100 0 _aGaura, Elena
245 1 0 _aSmart MEMS and sensor systems
260 _aLondon
_bImperial College Press
_c2006
300 _a539p.
500 _aIncludes index
650 _aApplied physics
650 0 _aSensor systems
700 _aNewman, Robert
942 _cBK
999 _c15757
_d15757