| 000 | 00420cam a2200157ua 4500 | ||
|---|---|---|---|
| 020 | _a81-312-0279-8 | ||
| 082 |
_a621.38152 _bOHR/M |
||
| 100 | 0 | _aOhring, Milton | |
| 245 | 1 | 0 | _aMaterials science of thin films: deposition & structure |
| 260 |
_aSan Diego _bAcademic Press _c2002 |
||
| 300 | _a794p. | ||
| 500 | _aIncludes index. | ||
| 650 | _aMaterial science | ||
| 650 | 0 | _aApplied physics-Thin films | |
| 942 | _cBK | ||
| 999 |
_c15725 _d15725 |
||