TY  - BOOK
AU  - Ohring, Milton
TI  - Materials science of thin films: deposition & structure  
SN  - 81-312-0279-8
U1  - 621.38152 
PY  - 2002///
CY  - San Diego
PB  - Academic Press
KW  - Material science
KW  - Applied physics-Thin films
N1  - Includes index
ER  -