TY  - BOOK
AU  - Delchar, T. A.
TI  - Vacuum physics and techniques
SN  - 9789402420067
U1  - 533.5	 
PY  - 1993///
CY  - London
PB  - Chapman & Hall
KW  - Vacuum
KW  - Vacuum technology
KW  - Phyisics
ER  -