TY  - BOOK
AU  - Pelesko,John A.
AU  - Bernstein, David H.
TI  - Modeling MEMS and NEMS / 
SN  - 1-58488-306-5
U1  - 621.3 
PY  - 2003///
CY  - Boca Raton
PB  - Chapman&Hall
KW  - Microelectromechanical systems- Mathematical models
N1  - Includes index
ER  -